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孙振元:A MEMS Based Electrochemical Seismometer with central Working Frequency under 1HZ and Ultra-low Self-noise

2016-08-09
關(guān)鍵詞: MEMS 微纳米
內(nèi)容簡(jiǎn)介:孫振元:A MEMS Based Electrochemical Seismometer with central Working Frequency under 1HZ and Ultra-low Self-noise